Preparation and Investigation of Diamond-Like Carbon Nanostructured Films

Zh. R. Panosyan

doi:doi:10.11648/j.nano.s.2017050301.23

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Preparation and Investigation of Diamond-Like Carbon Nanostructured Films

Zh. R. Panosyan

Published in American Journal of Nano Research and Applications (Volume 5, Issue 3-1)

Received: 1 March 2017 Accepted: 3 March 2017 Published: 23 March 2017

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Abstract

A novel equipment of preparation of films by low temperature plasma assisted chemical vapor deposition (CVD) technique is built which allowed controlling the technological process in real-time mode. Diamond-like carbon (DLC) films were synthesized which exposed 99% transparency in wide range of spectrum, λ = 250 – 1100 nm. Also, technical modes using Ta2O5 stimulator were found allowing to obtain low resistivity of DLC as low as 310 – 4 Ohm cm at the optical transparency remaining as high as 85%. The features of the surface of films were studied by atomic force microscopy (AFM) and the layer adjacent to the surface by scanning electron microscopy (SEM). It is shown that stimulating centers on the substrate surface form nanotubes arranged parallel to the surface due to which electrical conductivity of the DLC film grows higher.

Published in	American Journal of Nano Research and Applications (Volume 5, Issue 3-1) This article belongs to the Special Issue Nanotechnologies
DOI	10.11648/j.nano.s.2017050301.23
Page(s)	60-63
Creative Commons	This is an Open Access article, distributed under the terms of the Creative Commons Attribution 4.0 International License (http://creativecommons.org/licenses/by/4.0/), which permits unrestricted use, distribution and reproduction in any medium or format, provided the original work is properly cited.
Copyright	Copyright © The Author(s), 2017. Published by Science Publishing Group

Keywords

Technology of Nanostructure, Diamond-Like Carbon Films, Plasma Enhanced CVD Method, Conductive and Transparent Films, AFM, SEM

References

[1]	H. Mariguchi, H. Ohara, M. Tsujioka, “History and applications of diamond-like carbon manufacturing processes,” SEI Tech. Rev., pp. 52-58, 2013.
[2]	J. Robertson, “Diamond-like amorphous carbon,” Mater. Sci. Eng., vol. R37, pp. 129-281, 2002.
[3]	S. S. Voskanyan, Y. V. Yengibaryan, K. G. Karapetyan, Zh. R. Panosyan, “Optical prperties of diamond-like carbon films,” J. Contemp. Phys. (Arm. Acad. Sci.), vol. 34, pp. 358-361, 1999.
[4]	K. S. Novoselov, “Graphene: Materials in the flatland,” Nobel Lecture, 2010 Dec 8, pp. 106-131, 2010.
[5]	Zh. R. Panosyan, A. V. Meliksetyan, S. S. Voskanyan, Y. V. Yengibaryan, A. A. Sahakyan, A. T. Darbasyan. “Observation of structural changes in carbon films under external influenses,” Diam. Rel. Mater., vol. 15, pp. 394-397, 2006.
[6]	Zh. R. Panosyan, A. T. Darbasyan, A. V. Meliksetyan, S. S. Voskanyan, A. S. Voskanyan, A. A. Sahakyan, R. V. Gzraryan, “Low resistive diamond-like carbon film development technique,” Thin Solid Films, vol. 517, pp. 5404-5408, 2009.
[7]	J. Pern, K. Touryan, Zh. Panosyan, A. Gippius, “Method and apparatures for making diamond-like carbon films,” US Patent No 7,459,188B2, 12 pp., Dec 2, 2008.
[8]	H. Zhu, J. Wei, K. Wang, D. Wu, “Applications of carbon materials in photovoltaic solar cells,” Solar Energy Mater. Solar Cells, vol. 93, pp. 1461-1470, 2009.
[9]	Zh. R. Panosyan, S. S. Voskanyan,Ye. V. Yengibaryan, M. G. Azaryan, A. A. Sahakyan, H. N. Yeritsyan, V. V. Harutyunyan, “Physical properties of conducting diamond-like carbon nanostructure films transparent in the visible range of light, deposited on silicon,” Nano Studies, vol. 10, pp. 67-76, 2014.
[10]	Y. Yamagata, A. Sharma, J. Narayan, “An improved electron scattering simulation at the mask in a project ion lithography system,” J. Appl. Phys., vol., 88, pp. 6861-6868, 2000.
[11]	N. A. Sanchez, C. Rincon, G. Zambrano, H. Galindo, P. Prieto, “Characterization of diamond-like carbon (DLC) thin films prepared by r.f. magnetron sputtering,” Thin Solid Films, vol. 373, pp. 247-250, 2000.
[12]	Zh. R. Panosyan, A. T. Darbasyan, S. S. Voskanyan, Y. V. Yengibaryan, “Methods for preporation of transparent conductive diamond-like carbon films and mechanisms of conductivity formation,” J. Contemp. Phys. (Arm. Acad. Sci.), vol. 49, pp. 286-292, 2014.

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Zh. R. Panosyan. (2017). Preparation and Investigation of Diamond-Like Carbon Nanostructured Films. American Journal of Nano Research and Applications, 5(3-1), 60-63. https://doi.org/10.11648/j.nano.s.2017050301.23

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ACS Style

Zh. R. Panosyan. Preparation and Investigation of Diamond-Like Carbon Nanostructured Films. Am. J. Nano Res. Appl. 2017, 5(3-1), 60-63. doi: 10.11648/j.nano.s.2017050301.23

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AMA Style

Zh. R. Panosyan. Preparation and Investigation of Diamond-Like Carbon Nanostructured Films. Am J Nano Res Appl. 2017;5(3-1):60-63. doi: 10.11648/j.nano.s.2017050301.23

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@article{10.11648/j.nano.s.2017050301.23,
  author = {Zh. R. Panosyan},
  title = {Preparation and Investigation of Diamond-Like Carbon Nanostructured Films},
  journal = {American Journal of Nano Research and Applications},
  volume = {5},
  number = {3-1},
  pages = {60-63},
  doi = {10.11648/j.nano.s.2017050301.23},
  url = {https://doi.org/10.11648/j.nano.s.2017050301.23},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.nano.s.2017050301.23},
  abstract = {A novel equipment of preparation of films by low temperature plasma assisted chemical vapor deposition (CVD) technique is built which allowed controlling the technological process in real-time mode. Diamond-like carbon (DLC) films were synthesized which exposed 99% transparency in wide range of spectrum, λ = 250 – 1100 nm. Also, technical modes using Ta2O5 stimulator were found allowing to obtain low resistivity of DLC as low as 310 – 4 Ohm cm at the optical transparency remaining as high as 85%. The features of the surface of films were studied by atomic force microscopy (AFM) and the layer adjacent to the surface by scanning electron microscopy (SEM). It is shown that stimulating centers on the substrate surface form nanotubes arranged parallel to the surface due to which electrical conductivity of the DLC film grows higher.},
 year = {2017}
}

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TY  - JOUR
T1  - Preparation and Investigation of Diamond-Like Carbon Nanostructured Films
AU  - Zh. R. Panosyan
Y1  - 2017/03/23
PY  - 2017
N1  - https://doi.org/10.11648/j.nano.s.2017050301.23
DO  - 10.11648/j.nano.s.2017050301.23
T2  - American Journal of Nano Research and Applications
JF  - American Journal of Nano Research and Applications
JO  - American Journal of Nano Research and Applications
SP  - 60
EP  - 63
PB  - Science Publishing Group
SN  - 2575-3738
UR  - https://doi.org/10.11648/j.nano.s.2017050301.23
AB  - A novel equipment of preparation of films by low temperature plasma assisted chemical vapor deposition (CVD) technique is built which allowed controlling the technological process in real-time mode. Diamond-like carbon (DLC) films were synthesized which exposed 99% transparency in wide range of spectrum, λ = 250 – 1100 nm. Also, technical modes using Ta2O5 stimulator were found allowing to obtain low resistivity of DLC as low as 310 – 4 Ohm cm at the optical transparency remaining as high as 85%. The features of the surface of films were studied by atomic force microscopy (AFM) and the layer adjacent to the surface by scanning electron microscopy (SEM). It is shown that stimulating centers on the substrate surface form nanotubes arranged parallel to the surface due to which electrical conductivity of the DLC film grows higher.
VL  - 5
IS  - 3-1
ER  -

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Author Information

Zh. R. Panosyan

Laboratory of Helitechnic, National Polytechnic University of Armenia, Yerevan, Armenia

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APA Style

Zh. R. Panosyan. (2017). Preparation and Investigation of Diamond-Like Carbon Nanostructured Films. American Journal of Nano Research and Applications, 5(3-1), 60-63. https://doi.org/10.11648/j.nano.s.2017050301.23

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ACS Style

Zh. R. Panosyan. Preparation and Investigation of Diamond-Like Carbon Nanostructured Films. Am. J. Nano Res. Appl. 2017, 5(3-1), 60-63. doi: 10.11648/j.nano.s.2017050301.23

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AMA Style

Zh. R. Panosyan. Preparation and Investigation of Diamond-Like Carbon Nanostructured Films. Am J Nano Res Appl. 2017;5(3-1):60-63. doi: 10.11648/j.nano.s.2017050301.23

Copy | Download

@article{10.11648/j.nano.s.2017050301.23,
  author = {Zh. R. Panosyan},
  title = {Preparation and Investigation of Diamond-Like Carbon Nanostructured Films},
  journal = {American Journal of Nano Research and Applications},
  volume = {5},
  number = {3-1},
  pages = {60-63},
  doi = {10.11648/j.nano.s.2017050301.23},
  url = {https://doi.org/10.11648/j.nano.s.2017050301.23},
  eprint = {https://article.sciencepublishinggroup.com/pdf/10.11648.j.nano.s.2017050301.23},
  abstract = {A novel equipment of preparation of films by low temperature plasma assisted chemical vapor deposition (CVD) technique is built which allowed controlling the technological process in real-time mode. Diamond-like carbon (DLC) films were synthesized which exposed 99% transparency in wide range of spectrum, λ = 250 – 1100 nm. Also, technical modes using Ta2O5 stimulator were found allowing to obtain low resistivity of DLC as low as 310 – 4 Ohm cm at the optical transparency remaining as high as 85%. The features of the surface of films were studied by atomic force microscopy (AFM) and the layer adjacent to the surface by scanning electron microscopy (SEM). It is shown that stimulating centers on the substrate surface form nanotubes arranged parallel to the surface due to which electrical conductivity of the DLC film grows higher.},
 year = {2017}
}

Copy | Download

TY  - JOUR
T1  - Preparation and Investigation of Diamond-Like Carbon Nanostructured Films
AU  - Zh. R. Panosyan
Y1  - 2017/03/23
PY  - 2017
N1  - https://doi.org/10.11648/j.nano.s.2017050301.23
DO  - 10.11648/j.nano.s.2017050301.23
T2  - American Journal of Nano Research and Applications
JF  - American Journal of Nano Research and Applications
JO  - American Journal of Nano Research and Applications
SP  - 60
EP  - 63
PB  - Science Publishing Group
SN  - 2575-3738
UR  - https://doi.org/10.11648/j.nano.s.2017050301.23
AB  - A novel equipment of preparation of films by low temperature plasma assisted chemical vapor deposition (CVD) technique is built which allowed controlling the technological process in real-time mode. Diamond-like carbon (DLC) films were synthesized which exposed 99% transparency in wide range of spectrum, λ = 250 – 1100 nm. Also, technical modes using Ta2O5 stimulator were found allowing to obtain low resistivity of DLC as low as 310 – 4 Ohm cm at the optical transparency remaining as high as 85%. The features of the surface of films were studied by atomic force microscopy (AFM) and the layer adjacent to the surface by scanning electron microscopy (SEM). It is shown that stimulating centers on the substrate surface form nanotubes arranged parallel to the surface due to which electrical conductivity of the DLC film grows higher.
VL  - 5
IS  - 3-1
ER  -

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